College of Mechanical Engineering and Automation, Dalian Polytechnic University, Dalian 116034, P. R. China
TP391.41
This work was supported by the 2021 Annual Scientific Research Funding Project of Liaoning Provincial Department of Education (Nos. LJKZ0535, LJKZ0526) and the Natural Science Foundation of Liaoning Province(No. 2021-MS-300).
YANG Yining, WEI Honglei. Wafer Defect Map Pattern Recognition Based on Improved ResNet[J]. Transactions of Nanjing University of Aeronautics & Astronautics,2024,(S):81-88
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